Advint has been selected by Tosoh SMD to develop a LabVIEW software application for Dynamic Flux Measurement of semiconductor sputtering targets. This is accomplished via a 3 axis probe connected to a 3 channel Gauss Meter, and a National Instruments portable USB-Based DAQ with simultaneous sampling capabilities. The system acts as a virtual oscilloscope to monitor waveforms on a laptop computer, and incorporate all four individual waveforms (3 axes and trigger signal) on the graph. The process in repeated for user selectable incremental radial distances on the target face. A set of waveforms is collected at each of the locations and saved to the data set. The height of the probe above the target face is also adjustable to allow multiple measurements in the z-axis. Waveform data is saved for various algorthimic analysis via post processing .
Tosoh SMD is the global leader in semiconductor target technology. Through advanced engineering and state-of-the-art equipment, Tosoh produces quality sputtering targets for leading semiconductor producers worldwide. With operating bases in Japan, United States, and Korea, Tosoh’s sputtering targets are available in a variety of high-purity metals, metal alloys, cermet and ceramic compositions. Targets can be made in all shapes, sizes and purity levels to meet design specifications. Tosoh’s sputtering targets are used for the production of semiconductors, magnetic recording media (rigid disks, rewritable-optical disks), recording heads, thermal print heads, flat-panel displays and thin-film resistors.
Sputtering is a physical deposition using mechanical or thermodynamic means to produce a thin film of solid when creating semiconductor devices. Sputtering relies on a plasma to knock material from a "target" a few atoms at a time. The target can be kept at a relatively low temperature making this one of the most flexible deposition techniques. It is especially useful for compounds or mixtures, where different components would otherwise tend to evaporate at different rates.
Tosoh SMD, a wholly owned subsidiary of Tosoh Corporation, which evolved from humble beginnings in 1935 as a producer of caustic soda and soda ash in Japan. The Japanese characters for “Tosoh”, in fact, are an abbreviation for oriental soda. Today, the Company is a multinational corporation that generates an array of products to suit modern lifestyles and that contribute to the development of cutting-edge products and technologies. Tosoh is a global supplier of inorganic chemicals, petrochemicals, and specialty materials. As a result, the Group’s customers include the semiconductor, pharmaceutical, health care and food, and many other industries that produce items used daily. The Tosoh Group comprises 140 companies and more than 50 of those firms are located outside Japan. Together, Group companies employ a multiethnic workforce of over 10,000 people and generate net sales of approximately US$6.6 billion.
Advint is a rapidly growing system integrator of automated test systems located in Columbus, OH. The company is an NI Alliance Member, a member of the Teradyne Support Network, and part of the Huntron Integration Service Network. Advint provides hardware/software development and systems integration services in support of the test & measurement, and industrial automation industries.
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